Hitachi High-Tech

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Hitachi High-Tech and ZEISS accelerate next-generation defect inspection tool●『複数の電子線から大量の画像データが生成される』 10nm以下の欠陥を数十倍の速度で検査、日立ハイテクとZEISSが次世代検査装置の開発を加速 https:// news.mynavi.jp/techplus/articl e/20Mmastodon World21 d ago
Hitachi High-Tech and ZEISS are speeding up development of a next-generation semiconductor inspection device that uses multiple electron beams to generate large volumes of image data. The tool can detect defects smaller than 10 nanometers at speeds tens of times faster than conventional systems, addressing inspection bottlenecks in advanced chip manufacturing.